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MiScan 高效混合直写光刻系统
MiScan 高效混合直写光刻系统
MiScan 高效混合直写光刻系统
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MiScan 高效混合直写光刻系统
技术特点
可选配大功率光源405nmLD、355nmDPSSL（Dpssl355nm激光光源寿命大于20000小时）
标准支持12英寸幅面基板，其他幅面可定制
多维光刻(偏振曝光、干涉曝光、1024阶3D曝光)
高精密工件台
高精度环控系统
自动聚焦，实时对准
分区定位，多基片，多任务曝光
支持自动与手动对准
GDSII、BMP、STL等文件格式支持
规格参数
* 具体指标因工艺差异有所不同
应用示例
只有注册用户才能使用该功能
